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Derniers dépôts
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Thibaut Meyer, Aurélie Girard, Christophe Cardinaud, Marek Bouška, Emeline Baudet, et al.. Investigation of plasma species, etch products and surface modification during etching of Ge, Sb and Se-based materials in CH 4 -H 2 -Ar plasmas. 25th International Symposium on Plasma Chemistry (ISPC25), May 2023, Kyoto, Japan. ⟨hal-04675793⟩
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T Meyer, A Girard, M Bouska, E Baudet, M Baillieul, et al.. Investigation of plasma species, etch products and surface modification during etching of Ge, Sb and Se-based materials in CH4-H2-Ar plasmas. 25th International Symposium on Plasma Chemistry (ISPC25), Takayuki Watanabe - Kyushu University; Satoshi Hamaguchi - Osaka University, May 2023, Kyoto, Japan. ⟨hal-04675788⟩
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S Chouteau, A Durocher-Jean, A Granier, M Richard-Plouet, L Stafford. Time-resolved analysis of Ar metastable and electron populations in low-pressure misty plasma processes using optical emission spectroscopy. Plasma Sources Science and Technology, 2024, 33 (7), pp.075016. ⟨10.1088/1361-6595/ad5d11⟩. ⟨hal-04672943⟩
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Simon Chouteau, L. Stafford, Agnès Granier, Antoine Goullet, Mireille Richard-Plouet. Handling Nanoparticle Content in Nanocomposite Thin Films Deposited by Misty Plasma Processes through Controlled Flash Boiling Atomization. Langmuir, 2024, 40 (6), pp.3015-3023. ⟨10.1021/acs.langmuir.3c03176⟩. ⟨hal-04549282⟩
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Issraa Shahine, Quentin Hatte, Maxime Harnois, Pierre-Yves Tessier. Large Area Freestanding Au Nanoporous Ultrathin Films Transfer Printed on Bendable Substrates and 3D Surfaces for Flexible Electronics. ACS Applied Electronic Materials, 2024, 6 (4), pp.2281-2288. ⟨10.1021/acsaelm.3c01771⟩. ⟨hal-04552765⟩
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Pascal Bargiela, Vincent Fernandez, Christophe Cardinaud, John Walton, Mark Greiner, et al.. Towards a reliable assessment of charging effects during surface analysis: Accurate spectral shapes of ZrO2 and Pd/ZrO2 via X-ray Photoelectron Spectroscopy. Applied Surface Science, 2021, 566, pp.150728. ⟨10.1016/j.apsusc.2021.150728⟩. ⟨hal-03355769⟩
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Allan Lebreton, Marie-Paule Besland, Pierre-Yves Jouan, Tatiana Signe, Cédric Mannequin, et al.. Control of microstructure and composition of reactively sputtered vanadium nitride thin films based on hysteresis curves and application to microsupercapacitors. Journal of Vacuum Science & Technology A, 2024, 42 (2), pp.023405. ⟨10.1116/5.0177028⟩. ⟨hal-04423908⟩
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Michael Rodriguez-Fano, Mohamad Haydoura, Julien Tranchant, Etienne Janod, Benoît Corraze, et al.. Enhancing the Resistive Memory Window through Band Gap Tuning in Solid Solution (Cr1–xVx)2O3. ACS Applied Materials & Interfaces, 2023, 15 (47), pp.54611-54621. ⟨10.1021/acsami.3c09387⟩. ⟨hal-04361024⟩
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J. Zgheib, L. Berthelot, J. Tranchant, N. Ginot, M.-P. Besland, et al.. Electron-enhanced high power impulse magnetron sputtering with a multilevel high power supply: Application to Ar/Cr plasma discharge. Journal of Vacuum Science & Technology A, 2023, 41 (6), pp.063003. ⟨10.1116/6.0002857⟩. ⟨hal-04299303⟩
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Nombre de documents
82
Nombre de notices
294
Mots-clés
B3 Solar cells
Resistive switching
Titanium dioxide
Band alignment
3 nm in size
Bixbyite
SF 6
Sol-gel
Rutile
A Multilayers
Oxides
Plasmas froids
Ablation laser
TEM
BOMBARDMENT
AlN
Selenization
Etching
Low-pressure plasma processing
Semiconductors
Chalcogenide
Optical waveguides
Residual stress
CH4
Magnetron sputtering
Capacitance
Films
Carbon Nanotube
Plasma etching
Ambipolar material
Biofilms microbiens
NEXAFS
Avalanche breakdown
V2O3
A Chalcogenides
Nanotubes
Argon InP chlorine etching inductive coupled plasma ICP modeling plasma sheath simulation
CaTiO3Pr^3^+
Sputtering
Mott insulator
Thin films
Bipolar resistive switching BRS
Structure
Non-volatile memory
AuCu alloy
B1 Inorganic compounds
Colloidal solution
CHLORINE PLASMAS
Mass spectrometry
Thin film
Alzheimer's disease
B2 Semiconducting alloys
Amyloid precursor
X-ray photoelectron spectroscopy
Transmission electron microscopy
Biomasse
Aluminium nitride
Buffer Couple
Functionalization
Scanning electron microscopy
Atomic layer etching
Band gap
PECVD
Biocapteurs
Kirkendall effect
Nanocomposite
A-CNx
Atomic force microscopy
B2 Semiconducting indium compounds
X-ray diffraction
Physical vapor deposition
B2 Quaternary
Adsorption
TiO2
XPS
Integrated optics
CIGSe
Anatase
Mott insulators
CNTs’ collapse
Optical interferometry
A1 Characterization
A3 Physical vapor deposition processes
A Thin films
Calcined clay
C Photoelectron spectroscopy
Optical properties
Spectroscopic ellipsometry
Aryl-diazonium salts
Vanadium Sesquioxide
Carbon
Biomembranes
Amorphous
Transfert d'énergie
Applications industrielles
Annealing
B Chemical synthesis
AZO thin films
Alloying
Copper